JPH0157304B2 - - Google Patents
Info
- Publication number
- JPH0157304B2 JPH0157304B2 JP56050479A JP5047981A JPH0157304B2 JP H0157304 B2 JPH0157304 B2 JP H0157304B2 JP 56050479 A JP56050479 A JP 56050479A JP 5047981 A JP5047981 A JP 5047981A JP H0157304 B2 JPH0157304 B2 JP H0157304B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- diaphragm
- pump
- injection
- support frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/26—Devices characterised by the use of fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Reciprocating Pumps (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/137,110 US4305293A (en) | 1980-04-03 | 1980-04-03 | Angular rate sensor with symmetrical diaphragm impulse pump assembly |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56168161A JPS56168161A (en) | 1981-12-24 |
JPH0157304B2 true JPH0157304B2 (en]) | 1989-12-05 |
Family
ID=22475875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5047981A Granted JPS56168161A (en) | 1980-04-03 | 1981-04-03 | Fluid jetting angular velocity sensor |
Country Status (4)
Country | Link |
---|---|
US (1) | US4305293A (en]) |
EP (1) | EP0037795B1 (en]) |
JP (1) | JPS56168161A (en]) |
DE (1) | DE3172296D1 (en]) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4295373A (en) * | 1980-04-03 | 1981-10-20 | United Technologies Corporation | Fluidic angular rate sensor with integrated impulse jet pump assembly |
US4726227A (en) * | 1984-10-22 | 1988-02-23 | United Technologies Corporation | Angular velocity sensor having low temperature sensitivity |
US4830577A (en) * | 1988-04-11 | 1989-05-16 | United Technologies Corporation | Impulse pump with a metal diaphragm |
US4945764A (en) * | 1988-12-09 | 1990-08-07 | Frederick Gary L | Constant gain laminar jet angular rate sensing device |
CN1142034C (zh) * | 1999-03-08 | 2004-03-17 | 约翰逊父子公司 | 用于连接承受振荡的雾化器部件的方法及雾化器 |
JP5898470B2 (ja) * | 2011-11-22 | 2016-04-06 | ローム株式会社 | 角速度検出装置およびその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3107630A (en) * | 1955-01-31 | 1963-10-22 | Textron Inc | Non-magnetic electro-hydraulic pump |
US3360664A (en) * | 1964-10-30 | 1967-12-26 | Gen Dynamics Corp | Electromechanical apparatus |
DE1488698C3 (de) * | 1965-08-05 | 1973-11-15 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Elektrische Antriebsvorrichtung, insbesondere Antriebsvorrichtung fur eine kleine mechanische Nutzlast |
US3361067A (en) * | 1966-09-09 | 1968-01-02 | Nasa Usa | Piezoelectric pump |
US3587328A (en) * | 1969-06-05 | 1971-06-28 | Hercules Inc | A fluid-jet deflection type instrument having a diaphragm type pump with piezoelectric actuation |
US3626765A (en) * | 1969-06-05 | 1971-12-14 | Hercules Inc | Fluid jet deflection type instrument |
JPS5296076A (en) * | 1976-02-07 | 1977-08-12 | Ricoh Co Ltd | Rotational stop detector |
US4020700A (en) * | 1976-02-25 | 1977-05-03 | United Technologies Corporation | Unitary fluidic angular rate sensor |
US4295373A (en) * | 1980-04-03 | 1981-10-20 | United Technologies Corporation | Fluidic angular rate sensor with integrated impulse jet pump assembly |
-
1980
- 1980-04-03 US US06/137,110 patent/US4305293A/en not_active Expired - Lifetime
-
1981
- 1981-04-02 EP EP81630029A patent/EP0037795B1/en not_active Expired
- 1981-04-02 DE DE8181630029T patent/DE3172296D1/de not_active Expired
- 1981-04-03 JP JP5047981A patent/JPS56168161A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0037795A2 (en) | 1981-10-14 |
US4305293A (en) | 1981-12-15 |
EP0037795A3 (en) | 1982-01-06 |
JPS56168161A (en) | 1981-12-24 |
DE3172296D1 (en) | 1985-10-24 |
EP0037795B1 (en) | 1985-09-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5757608A (en) | Compensated pressure transducer | |
CA1321481C (en) | Rocking beam vortex sensor | |
JP3416140B2 (ja) | 容量性圧力センサ | |
US5118981A (en) | Piezoelectric sensor for monitoring kinetic momentum | |
CA1122429A (en) | Surface acoustic wave (saw) pressure sensor structure | |
US8069732B2 (en) | Ultra-miniature multi-hole probes having high frequency, high temperature responses | |
US4295373A (en) | Fluidic angular rate sensor with integrated impulse jet pump assembly | |
CN101603870B (zh) | 压力传感器用膜片和压力传感器 | |
US4675643A (en) | Pressure transducer utilizing a transduction element | |
US4020700A (en) | Unitary fluidic angular rate sensor | |
EP0083647A1 (en) | Improved capacitance pressure sensor | |
CA1090606A (en) | Vibrating diaphragm fluid pressure sensor device | |
US4559832A (en) | Piezoelectric pressure frequency sensor | |
JPH0157304B2 (en]) | ||
EP1190224B1 (en) | Straight tube coriolis flowmeter assembly | |
CN112113552A (zh) | 一种微型振动陀螺仪敏感单元及陀螺仪 | |
JPS63193018A (ja) | 渦メータセンサ | |
JP3410257B2 (ja) | 圧力センサ | |
US5197336A (en) | Karman vortex flow meter | |
US5313843A (en) | Karman vortex flow meter | |
JP3158354B2 (ja) | 圧力検出装置 | |
JPH1130561A (ja) | 圧力検出器 | |
JPS61259175A (ja) | 圧電型力学量センサ | |
JP3158353B2 (ja) | 圧力検出装置 | |
JPH09126839A (ja) | 渦流量計センサ |